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Simulation of a plasma enhanced µ-jet-CVD process
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2006
Journal Article
Titel
Simulation of a plasma enhanced µ-jet-CVD process
Author(s)
Dehning, C.
Holländer, A.
Leventy-Peetz, A.-M.
Silmy, K.
Zeitschrift
NAFEMS international journal of CFD case studies
Language
English
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Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI