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Micro-jet plasma CVD with HMDSO/O2
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2005
Conference Paper
Titel
Micro-jet plasma CVD with HMDSO/O2
Author(s)
Silmy, K.
Holländer, A.
Dillmann, A.
Thömel, J.
Hauptwerk
Plasma surface engineering, PSE 2004
Konferenz
International Conference on Plasma Surface Engineering (PSE) 2004
DOI
10.1016/j.surfcoat.2005.02.083
Language
English
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Fraunhofer-Institut für Angewandte Polymerforschung IAP