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A fabrication approach for passive RF-elements on the top of complete manufactured semiconductor wafers
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2006
Conference Paper
Titel
A fabrication approach for passive RF-elements on the top of complete manufactured semiconductor wafers
Author(s)
Klug, C.
Hürrich, A.
Barthel, W.
Schweizer, I.
Nüske, L.
Haase, T.
Bibas, P.
Fischer, W.-J.
Hauptwerk
7th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2006. Proceedings
Konferenz
International Symposium on RF MEMS and RF Microsystems (MEMSWAVE) 2006
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Tags
passive RF-element
fabrication process
high-Q inductor