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A fabrication approach for passive RF-elements on the top of complete manufactured semiconductor wafers

 
: Klug, C.; Hürrich, A.; Barthel, W.; Schweizer, I.; Nüske, L.; Haase, T.; Bibas, P.; Fischer, W.-J.

AMICOM, The European Network of Excellence on RF MEMS and RF Microsystems:
7th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2006. Proceedings : Orvieto, Italy, June, 27-30 2006
Ovieto, 2006
pp.24-26
International Symposium on RF MEMS and RF Microsystems (MEMSWAVE) <7, 2006, Orvieto>
English
Conference Paper
Fraunhofer IPMS ()
passive RF-element; fabrication process; high-Q inductor

: http://publica.fraunhofer.de/documents/N-45457.html