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Micro-actuator with extended analog deflection at low drive voltage

 
: Dürr, P.; Gehner, A.; Schmidt, J.; Kunze, D.; Wagner, M.; Lakner, H.

Ürey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS display, imaging, and miniaturized microsystems IV : 25 - 26 January 2006, San Jose, California, USA
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6114)
ISBN: 0-8194-6156-3
Paper 61140I
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" <4, 2006, San Jose/Calif.>
English
Conference Paper
Fraunhofer IPMS ()
SLM; pull-in; analog; extended range; electrostatic

: http://publica.fraunhofer.de/documents/N-45449.html