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Highly reflective optical coatings for high power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

 
: Sandner, T.; Schmidt, J.U.; Schenk, H.; Lakner, H.; Yang, M.; Gatto, A.; Kaiser, N.; Braun, S.; Foltyn, T.; Leson, A.

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Ürey, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS display, imaging, and miniaturized microsystems IV : 25 - 26 January 2006, San Jose, California, USA
Bellingham/Wash.: SPIE, 2006 (SPIE Proceedings Series 6114)
ISBN: 0-8194-6156-3
Paper 61140H
Conference "MOEMS, Display, Imaging, and Miniaturized Microsystems" <4, 2006, San Jose/Calif.>
English
Conference Paper
Fraunhofer IPMS ()
Fraunhofer IWS ()
Fraunhofer IOF ()
MOEMS; micro scanning mirror; NIR-VIS-UV; highly reflective coating; high optical power density

: http://publica.fraunhofer.de/documents/N-45419.html