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Sub-100 nm nanostructuring of silicon by ultrashort laser pulses

: Harzic, R. le; Schuck, H.; Sauer, D.; Anhut, T.; Riemann, I.; König, K.

Postprint (1.8 MByte; PDF; )

Optics Express 13 (2005), No.17, pp.6651-6656
ISSN: 1094-4087
Journal Article, Electronic Publication
Fraunhofer IBMT ()

Techniques based on laser scanning microscopes for nanoprocessing of periodic structures on silicon with ultra-short laser pulses have been developed. Ripples of 800 - 900 nm spacing were obtained after laser irradiation at a wavelength of 1040 nm, a repetition rate of 10 kHz and a fluence of 2 J/cm2 in air. Smaller features of 70 - 100nm spacing were achieved in oil at a wavelength of 800 nm, a repetition rate of 90 MHz and a fluence of 200 - 300 mJ/cm2 by using a high numerical focusing objective.