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Ultrathin carbon-fluorine film processing

 
: Barz, J.; Haupt, M.; Vohrer, U.; Hilgers, H.; Oehr, C.

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Plasma surface engineering, PSE 2004 : Proceedings of the Ninth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 13 - 17, 2004
Amsterdam: Elsevier, 2005 (Surface and coatings technology 200.2005,1/4)
pp.453-457
International Conference on Plasma Surface Engineering (PSE) <9, 2004, Garmisch-Partenkirchen>
English
Conference Paper, Journal Article
Fraunhofer IGB ()

: http://publica.fraunhofer.de/documents/N-45340.html