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Development of a scanner-based direct laser interference patterning optical head: New surface structuring opportunities

: Kunze, Tim; Zwahr, Christoph; Krupop, Benjamin; Alamri, Sabri; Rößler, Florian; Lasagni, Andrés-Fabián


Klotzbach, U. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser-based Micro- and Nanoprocessing XI : San Francisco, California, United States, 31 January - 2 February 2017
Bellingham, WA: SPIE, 2017 (Proceedings of SPIE 10092)
Paper 1009214, 7 pp.
Conference "Laser-Based Micro- and Nanoprocessing" <11, 2017, San Francisco/Calif.>
Conference Paper
Fraunhofer IWS ()
lasers; scanners; fabrication

Periodic surface structures with micrometer or submicrometer resolution produced on surfaces of different technological parts can be used to improve their mechanical, biological or optical characteristics. While direct laser interference patterning (DLIP) already permits structuring speeds of up to 0.9 m2/min under constant process parameters, fabrication of individualized surface structures fabricated "on-the-fly" is not possible at high speeds. In this study, a scanner-based DLIP optical head is presented which combines the flexibility of the DLIP technology with a high-performance galvanometer scanner system. An evaluation of the structuring results as well as various application examples will be presented.