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Scalable gas sensors fabrication to integrate metal oxide nanoparticles with well-defined shape and size

: Gao, Haitao; Jia, He; Bierer, Benedikt; Wöllenstein, Jürgen; Lu, Yan; Palzer, Stefan


Sensors and Actuators. B 249 (2017), pp.639-646
ISSN: 0925-4005
Journal Article
Fraunhofer IPM ()
gas sensing; Copper(II)oxide; nanoparticles; Reproducible Fabrication

In this contribution, we propose and demonstrate a scalable and reproducible process to fabricate nano-sized functional particles and integrate them in microelectromechanical systems. We use a wet-chemistry approach for nanoparticle synthesis in combination with inkjet printing as a production process for metal oxide based gas sensors. This method enables control over size and shape of the nanoparticles as well as an ordered and reproducible deposition of a monolayer of particles onto arbitrary microstructures. Here we present results obtained using copper oxide nanoparticles as well as their synthesis and material characterization. A total of 14 layers has been produced and the baseline resistivity as well as the gas sensitive response towards oxygen, humidity and nitrogen dioxide of each layer has been determined.