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A miniature single-chip pressure and temperature sensor

: Kandler, Michael; Manoli, Yiannakis; Mokwa, Wilfried; Spiegel, Egbert; Vogt, Holger


Journal of micromechanics and microengineering 2 (1992), No.3, pp.199-201
ISSN: 0960-1317
ISSN: 1361-6439
Journal Article
Fraunhofer IMS ()
Druckmessung; Temperaturmessung; integrierter Drucksensor; integrierter Temperatursensor; Sensorausleseschaltung

In this paper a single chip pressure and temperature sensor system with on chip electronics for measuring blood pressure and temperature in human arteries is presented. The pressure sensor is fabricated by surface micromachining techniques using a CMOS process. For the signal processing switched capacitor circuits are used. The sensor signals are converted to a pulse width modulated output signal.