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Development and fabrication of a very high-g sensor for very high impact applications

: Mackowiak, Piotr; Mukhopadhyay, B.; Hu, X.; Ehrmann, O.; Lang, K.-D.; Linke, S.; Chu, A.; Ngo, H.-D.

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Institute of Physics -IOP-, London:
27th Micromechanics and Microsystems Europe Workshop, MME 2016 : 28-30 August 2016, Cork, Ireland
Bristol: IOP Publishing, 2016 (Journal of physics. Conference series 757)
ISBN: 978-1-5108-3225-1
Art. 012016, 8 pp.
Micromechanics and Microsystems Europe Workshop (MME) <27, 2016, Cork>
Conference Paper, Electronic Publication
Fraunhofer IZM ()

In this paper we present the first time our development work of a family of silicon on insulator (SOI)- based piezoresistive MEMS very high G sensors for measurement of accelerations up to 60.000 g. Two sensors have been realized, one for 20.000g and one for 60.000g.