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Precision multilayer coating for large high-end mirrors

: Müller, R.; Luca, A.; Eibisch, A.; Landrock, J.; Mai, J.; Stober, R.; Gawlitza, Peter; Braun, Stefan; Sarstedt, M.

Fulltext ()

Society of Vacuum Coaters. Digital library. Online resource (2015)
Society of Vacuum Coaters (Annual Technical Conference) <58, 2015, Santa Clara/Calif.>
Conference Paper, Electronic Publication
Fraunhofer IWS ()

Magnetron sputter deposition (MSD) has been used for precision multilayer coating of large high-end extreme ultraviolet- (EUV) and X-ray-mirrors. The MS 2000 is equipped with up to six sputter magnetrons, rotatable substrate holder for face down deposition and turning substrate with pre-calculated velocity maps. All mechanical parameters can be precisely adjusted, providing accurate process control and reproducible multilayer deposition. Reflectivity (> 70 %), uniformity (> 99.9 %), and reproducibility (>99.9 %) are presented for Mo/Si/C coatings. Stress control of such multilayer systems is critical.