Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition
: Kia, Alireza Mohammadian
| Chemnitz, 2017, III, 90 pp. + 2 pp. Anhang
Chemnitz, TU, Master Thesis, 2017 |
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| English |
| Master Thesis |
| Fraunhofer IPMS () |