Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Development of metal oxide processes for highly conformal thin layers by plasma enhanced atomic layer deposition

 
: Kia, Alireza Mohammadian
: Hiller, Karla; Weinreich, Wenke

Chemnitz, 2017, III, 90 pp. + 2 pp. Anhang
Chemnitz, TU, Master Thesis, 2017
English
Master Thesis
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-438977.html