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Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides

 
: Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf

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Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Integrated Optics: Devices, Materials, and Technologies XXI : San Francisco, California, United States, January 28, 2017
Bellingham, WA: SPIE, 2017 (Proceedings of SPIE 10106)
Paper 101060M, 9 pp.
Conference "Integrated Optics - Devices, Materials, and Technologies" <21, 2017, San Francisco/Calif.>
Deutsche Forschungsgemeinschaft DFG
FR-713/10-1
Bragg-Gitter-Sensoren auf Basis von Hybridpolymeren - Grundlegende Untersuchungen und Realisierung
Deutsche Forschungsgemeinschaft DFG
HE5150/1-1
Bragg-Gitter-Sensoren auf Basis von Hybridpolymeren - Grundlegende Untersuchungen und Realisierung
English
Conference Paper
Fraunhofer IISB ()
Bragg Grating; ORMOCER; hybrid polymer; nanoimprint lithography; sensor

Abstract
We report on the fabrication and characterization of Bragg gratings in UV-NIL structured Ormocer hybrid polymer rib-type waveguides using phase mask technology. The influence of fabrication parameters such as the applied laser fluence during the inscription process and the grating's length on the spectral behavior of the waveguide Bragg gratings was experimentally determined and compared to numerical simulations and calculations. To investigate potential sensor applications, the sensitivity of the thus fabricated optical devices towards refractive index changes of the gratings' surrounding (qualification for bio- and chemical sensing) as well as the sensitivity towards temperature and relative humidity were determined.

: http://publica.fraunhofer.de/documents/N-438346.html