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Investigation on gas bearings operable in high vacuum environment for high engineering at nanoscale

 
: Schenk, C.; Risse, S.

Chevrier, F. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
5th international conference of the European Society for Precision Engineering and Nanotechnology 2005. Vol.1 : May 8th - May 11th 2005, Montpellier, France
Montpellier, 2005
ISBN: 92-9900-350-5
pp.121-124
European Society for Precision Engineering and Nanotechnology (International Conference) <5, 2005, Montpellier>
English
Conference Paper
Fraunhofer IOF ()
air bearing; gas bearing; vacuum; exhaust

Abstract
The study presents theoretical and experimental results of basic investigations on high vacuum compatible gas bearing pads. Mechanical properties at ambient conditions and in a vacuum environment are compared. Differences between the two applications are presented. Pressure distribution is measured in high vacuum environment.

: http://publica.fraunhofer.de/documents/N-43700.html