2016
Conference Paper
Title

Adhesion mechanism between laser sputtered aluminum nano particles on Si-wafer by Nd:YAG laser

Abstract
In this research, different laser parameters is investigated using Nd:YAG Picosecond laser to sputter nano particles on Si-Wafer substrate. Furthermore, the influence of various parameters on adhesion tests and mechanism of deposited layer is studied.
Author(s)
Azhdast, M.H.
Eichler, H.J.
Lang, K.-D.
Glaw, V.
Mainwork
Conference
DOI
Language
English