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Automated aberration correction of arbitrary laser modes in high numerical aperture systems

: Hering, Julian; Waller, Erik H.; Freymann, Georg von

Fulltext ()

Optics Express 24 (2016), No.25, pp.28500-28508
ISSN: 1094-4087
Journal Article, Electronic Publication
Fraunhofer IPM ()
Aberration Compensation; Laser Modes; Optical Components; Phase Retrieval

Controlling the point-spread-function in three-dimensional laser lithography is crucial for fabricating structures with highest definition and resolution. In contrast to microscopy, aberrations have to be physically corrected prior to writing, to create well defined doughnut modes, bottlebeams or multi foci modes. We report on a modified Gerchberg-Saxton algorithm for spatial-light-modulator based automated aberration compensation to optimize arbitrary laser-modes in a high numerical aperture system. Using circularly polarized light for the measurement and first-guess initial conditions for amplitude and phase of the pupil function our scalar approach outperforms recent algorithms with vectorial corrections. Besides laser lithography also applications like optical tweezers and microscopy might benefit from the method presented.