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Back-End-of-Line integration technology of capacitive micromachined ultrasonic transducers (CMUT)

Presentation held at 15th International Conference on Micromachined Ultrasonic Transducers (MUT) 2016, 9-10 June 2016, Rome, Italy
 
: Koch, Sandro; Amelung, Jörg; Elsäßer, Linus; Kircher, Marco; Weder, Andreas; Pietzsch, Marcus; Heinig, Andreas; Müller, Michael

2016, 13 Folien
International Conference on Micromachined Ultrasonic Transducers (MUT) <15, 2016, Rome>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-432038.html