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MEMS tunable Fabry-Pérot filters for infrared microspectrometer applications

 
: Neumann, N.; Ebermann, M.; Hiller, K.; Seifert, M.; Meinig, M.; Kurth, S.

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Optical Society of America -OSA-, Washington/D.C.:
Imaging and Applied Optics 2016 : Meeting Congress, 25-28 July 2016, Heidelberg, Germany
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-15-6
Paper AIT4B.2
Imaging and Applied Optics Congress <2016, Heidelberg>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
Microspectrometers based on MEMS Fabry-Pérot interferometers as optical band-pass filters are a recently emerging solution. InfraTec is one of the leading suppliers of tunable infrared MEMS filters for gas analysis. The talk will present a brief overview of the standard MEMS tunable infrared filters and the next generation with enhanced properties.

: http://publica.fraunhofer.de/documents/N-426635.html