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Investigation of the influence of the sample topography on the measurement uncertainty of a scanning white light interferometer

 
: Adapa, Bharath Reddy
: Skupsch, Christoph; Lemmer, Uli

:
Fulltext urn:nbn:de:0011-n-4264879 (3.3 MByte PDF)
MD5 Fingerprint: 1ca2573e729659a9422901f8b1c087b8
Created on: 4.1.2017


Karlsruhe, 2016, IX, 58 pp.
Karlsruhe, Inst. für Technologie (KIT), Master Thesis, 2016
English
Master Thesis, Electronic Publication
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-426487.html