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TiSiCN nanocomposite hard coatings by CVD

: Höhn, Mandy; Endler, Ingolf; Matthey, Björn

Postprint urn:nbn:de:0011-n-4259018 (434 KByte PDF)
MD5 Fingerprint: 374873ab142451fe50fe7fbad021ae26
Created on: 9.12.2016

European Powder Metallurgy Association -EPMA-:
World PM 2016 Congress & Exhibition. USB Proceedings : The Powder Metallurgy World Congress, Hamburg, 9.-13.10.2016
Shrewsbury: EPMA, 2016
ISBN: 978-1-899072-48-4
6 pp.
Powder Metallurgy World Congress & Exhibition (PM) <2016, Hamburg>
Conference Paper, Electronic Publication
Fraunhofer IKTS ()
CVD; nanocomposite; TiSiCN

TiN and TiCxNy are commercial CVD coatings widely used for cutting tool applications. A promising route for improving hardness and oxidation resistance is the addition of silicon [1]. Therefore investigations were performed using a thermal CVD process with a gas mixture containing TiCl4 and SiCl4. This work is focused to the investigation of structure, composition and properties of the TiSiCN coatings deposited on hardmetal inserts. The ratio of the silicon precursor to TiCl4 is varied. The structure was analyzed by SEM, TEM and XRD. A maximum hardness about 40 GPa was observed at a silicon content around 12 at.% . In this silicon concentration range a TiCxNy grain size below 20 nm was determined. The investigation of the oxidation behavior shows an increase of the oxidation resistance with the silicon content. [1] I. Endler, M. Höhn, J. Schmidt, S. Scholz, M. Herrmann, M. Knaut, Surface & Coatings Technology, 215 (2013), 133.