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CVD-CoXN for advanced semiconductor metallization

Presentation held at 25th Materials for Advanced Metallization Conference, MAM 2016, 20-23 March 2016, Brussels, Belgium
 
: Dhavamani, Abitha; Wislicenus, Marcus; Gerlich, Lukas; Uhlig, Benjamin

2016, 27 Folien
Materials for Advanced Metallization Conference (MAM) <25, 2016, Brussels>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-425892.html