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Spatio-temporal proximity characteristics in 3D μ-printing via multi-photon absorption

: Waller, Erik Hagen; Freymann, Georg von

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Polymers. Online resource 8 (2016), No.8, Art. 297, 13 pp.
ISSN: 2073-4360
Journal Article, Electronic Publication
Fraunhofer IPM ()
3D μ-printing; direct laser writing; photo resist; polymerization

One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity-the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.