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Fabrication and characterization of a novel electrostatic actuator

Presentation held at 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, 17-20 April 2016, Matsushima Bay and Sendai MEMS City, Japan
 
: Gaudet, Matthieu

2016, 16 Folien
International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) <11, 2016, Matsushima Bay, Sendai>
English
Presentation
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-423689.html