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Non-destructive imaging of organosilicate glass (OSG) thin films at low voltage with the EsB detector

: Garitagoitia, Maria Aranzazu; Moayedi, Elham; Rosenkranz, Rüdiger; Clausner, André; Pakbaz, Khashayar; Zschech, Ehrenfried


IEEE transactions on device and materials reliability 16 (2016), No.4, pp.461-464
ISSN: 1530-4388
ISSN: 1558-2574
Journal Article
Fraunhofer IKTS ()
imaging; Organosilicate Glass; energy selective backscattered electron detector

Spatial resolution of Scanning Electron Microscopy (SEM) and electron-based material degradation of Organosilicate Glass (OSG) thin films are systematically studied using Low Voltage Scanning Electron Microscopy (LVSEM) imaging. In order to investigate the presence of shrinkage in this material, the primary beam voltage (Ep) and the working distance (WD) are optimized in combination with the use of the Energy selective Backscattered (EsB) electron detector. Results obtained with Backscattered Electron (BSE) imaging at low incident energies are discussed and compared to standard working conditions in the SEM.