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MOEMS based scanning grating facilitates miniaturization and tuning speed enhancement of an EC-QCL towards a µEC-QCL for real time spectroscopic sensing

 
: Grahmann, Jan

:

Optical Society of America -OSA-, Washington/D.C.:
Imaging and Applied Optics 2016 : Meeting Congress, 25-28 July 2016, Heidelberg, Germany
Washington, DC: OSA, 2016 (OSA Technical digest series)
ISBN: 978-1-943580-15-6
Paper AIT4B.3
Imaging and Applied Optics Congress <2016, Heidelberg>
Meeting "Applied Industrial Optics - Spectroscopy, Imaging and Metrology" <2016, Heidelberg>
English
Conference Paper
Fraunhofer IPMS ()

Abstract
The combination of an external cavity quantum cascade laser with a MOEMS based scanning diffraction grating of 1 kHz resonance frequency and its electrostatic drive is described. The characteristics of the MOEMS scan module as well as of the entire µEC-QCL like spectral line width and wavelength reproducibility are shown. Finally the µEC-QCL is used as light source for real time spectroscopic sensing of polystyrene and carbon monoxide. Article not available.

: http://publica.fraunhofer.de/documents/N-423050.html