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Extending VLSI and alternative technology with optical and complementary lithography

 
: Lai, K.; Erdmann, A.

:
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Journal of micro/nanolithography, MEMS and MOEMS 15 (2016), No.2, 2 pp.
ISSN: 1537-1646
ISSN: 1932-5150
ISSN: 1932-5134
English
Journal Article, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-422975.html