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Intrinsic stress measurement by FIB ion milling becomes an industrial-strength method
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2016
Conference Paper
Titel
Intrinsic stress measurement by FIB ion milling becomes an industrial-strength method
Author(s)
Vogel, D.
Auerswald, E.
Gadhiya, Ghanshyam
Auersperg, Jürgen
Sebastiani, M.
Rzepka, Sven
Hauptwerk
Smart Systems Integration 2016. Proceedings
Konferenz
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2016
Smart Systems Integration Conference (SSI) 2016
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS