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Best practice approaches for stress measurements on thin layer stacks

 
: Auerswald, E.; Vogel, D.; Sebastiani, M.; Lord, J.; Rzepka, S.

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
pp.368-371
Smart Systems Integration Conference (SSI) <2016, Munich>
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
As illustrated for single cases, the residual stress analysis based on FIB milling and DIC analysis has a large potential to determine residual stresses in thin layer systems. For the introduction of the FIB-DIC approach as industrial method, measurement automation with time saving fast measurement routines, cost efficient and validated measurement procedures are a basic prerequisite. A best practice report under preparation (in [6]) will give the industrial user guidance to implement and use the FIBDIC method with own equipment. Besides instructions to get started fast, a wide experience in applying the FIB-DIC method will be presented. It allows preparation of suitable measurement routines for customer specific problems, avoiding elaborate trial-and-error tests.

: http://publica.fraunhofer.de/documents/N-422758.html