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An integrated dual-polarity high-voltage driver concept for micropump applications

: Isa, B.K.E.; Schmitt-Landsiedel, D.; Maurer, L.

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
Smart Systems Integration Conference (SSI) <2016, Munich>
Conference Paper
Fraunhofer EMFT ()

We present a high-voltage DC/DC converter concept aimed to drive piezo-electric microfluidic elements, specifically micro-pumps for medical drug-dosing applications. The proposed high-voltage driver combines the advantages of DC/DC boost converters with the benefits of Dickson charge pumps. The topology comprises one high-voltage NMOS switch that is used to generate high-voltage, dual polarity output amplitudes where gains of factor 14 (for negative amplification) and 30 (for positive amplification) are achieved from a nominal supply voltage of 5 V. The driver was designed and simulated in 0.35-μm XFAB high-voltage technology (XU035). The proposed design is the first step towards preparing a high-voltage IC driver for supporting a MEMS micro-fluidic element. The topology behavior depending on the circuit load (i.e. micro-pump dimensions) and supply voltage are investigated and guidelines for optimal use are given.