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Semiconductor equipment assessment - An enabler for production ready equipment

 
: Pfeffer, M.; Pfitzner, L.; Bauer, A.

Laudon, M.:
TechConnect briefs 2016. Vol.4: Advanced manufacturing, electronics and microsystems
Danville, CA: TechConnect, 2016
ISBN: 978-0-9975117-4-1 (Set)
ISBN: 978-0-9975117-3-4 (Vol.4)
pp.167-170
TechConnect World Innovation Conference and Expo <2016, Washington/DC>
Nanotech Conference & Expo <19, 2016, Washington/DC>
English
Conference Paper
Fraunhofer IISB ()

Abstract
This paper will present advances in equipment research, in metrology equipment research, in improved collaboration strategies between equipment suppliers and end-users and in better controlled and smart manufacturing.

: http://publica.fraunhofer.de/documents/N-422586.html