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Silicon oxynitride microdisk resonators for integrated waveguide coupling

 
: Hett, T.; Frers, T.; Widhalm, A.; Berth, G.; Hilleringmann, U.; Zrenner, A.

Geßner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart Systems Integration 2016. Proceedings : International Conference and Exhibition on Integration Issues of Miniaturized Systems; Munich, Germany, 9-10 March 2016, USB-Stick
Auerbach: Verlag Wissenschaftliche Scripten, 2016
ISBN: 978-3-95735-040-4
ISBN: 3-95735-040-9
pp.400-403
Smart Systems Integration Conference (SSI) <2016, Munich>
International Conference and Exhibition on Integration Issues of Miniaturized Systems <10, 2016, Munich>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
In this study we present a fully CMOS compatible process for the integration of microdisk resonators which enables a direct coupling to integrated waveguides. As wave guiding material silicon oxynitride is used which is deposited by plasma enhanced chemical vapor deposition. Structures are realized with optical lithography with subsequent reactive ion etching. The characterization is realized by evanescent field coupling of tapered fiber tips to excite whispering gallery modes in the microdisk resonator.

: http://publica.fraunhofer.de/documents/N-422540.html