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A 83dB SNDR low power readout ASIC for piezoresistive nanogauge based gyroscopes

: Nikas, Antonios; Leman, Olivier; Zhou, Hayan; Lagos Benites, Jorge Luis; Vinchhi, Bakul Jitendra; Hauer, Johann


Sawan, M. ; IEEE Circuits and Systems Society:
ISCAS 2016, IEEE International Symposium on Circuits and Systems. Proceedings : Montreal, Canada
Piscataway, NJ: IEEE, 2016
ISBN: 978-1-4799-5341-7
ISBN: 978-1-4799-5340-0
ISBN: 978-1-4799-5342-4
International Symposium on Circuits and Systems (ISCAS) <2016, Montréal>
Conference Paper
Fraunhofer IIS ()

We report a 3-channel ASIC for M&NEMS coriolis vibratory gyroscopes. Key element of each analog frontend (AFE) channel is a closed-loop interface amplifier with current reuse for the biasing of the piezoresistive nanogauge sensor detection. The outputs of the 3-channels are multiplexed to a single band-pass sigma delta modulator for on-chip analog to digital conversion. The fabricated ASIC achieves per channel a SNDR of 73dB and 83dB for a 400Hz and 50Hz bandwidth respectively. A single AFE consumes 672μW at a supply voltage of 2.4V and occupies an area of 0.3mm2.