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Investigations on the emission in the extreme ultraviolet of a pseudospark based discharge light source

: Bergmann, K.; Vieker, J.; Wezyk, A. von


Journal of applied physics 120 (2016), No.14, Art. 143302
ISSN: 0021-8979
ISSN: 1089-7550
Journal Article
Fraunhofer ILT ()

A new concept of a discharge based extreme ultraviolet radiation source is presented. This concept is based on an electrode system that consists of two consecutive pseudospark discharge stages. The first stage is used to create a pinch plasma as emitter in the extreme ultraviolet and soft X-ray range and the second stage is used as a high current switch between the storage capacity and the first stage. First results on the emission characteristics for the working gases nitrogen, krypton, and xenon, with focus on the emission at 2.88 nm, 6–7 nm, and around 13.5 nm, respectively, are disclosed under the aspect of the access to a larger discharge parameter range. It is shown that this increased range opens a path to a higher spectral peak brightness.