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Atomic layer deposition system for fast precursor screening

Poster presented at 16th International Conference on Atomic Layer Deposition 2016, July 24th - 27th, 2016, Dublin, Ireland
 
: Shukla, Shashank; Hossbach, Christoph; Sundqvist, Jonas; Bönhardt, Sascha; Feddersen-Clausen, Oliver; Sharma, Varun; Albert, Matthias; Bartha, Johann W.

2016, 1 Folie
International Conference on Atomic Layer Deposition <16, 2016, Dublin>
English
Poster
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/documents/N-421245.html