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HF-release of sacrificial layers in CMOS-integrated MOEMS structures

Poster presented at 27th Micromechanics and Microsystems Europe Workshop, MME 2016, 28-30 August 2016, Cork, Ireland
 
: Döring, Sebastian; Friedrichs, Martin; Pufe, Wolfram; Schulze, Matthias

:
Poster urn:nbn:de:0011-n-4212422 (1.3 MByte PDF)
MD5 Fingerprint: dbd2aea76d82307cfa85317cc2c01bc0
Created on: 4.1.2017


2016, 1 Folie
Micromechanics and Microsystems Europe Workshop (MME) <27, 2016, Cork>
English
Poster, Electronic Publication
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-421242.html