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Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication

Poster presented at EMLC 2016, 32nd European Mask and Lithography Conference, Dresden, Germany, 21-22 June 2016
 
: Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar

:
Poster urn:nbn:de:0011-n-4189014 (2.6 MByte PDF)
MD5 Fingerprint: b556b3a50ffe0c427de700ac313d0c5e
Created on: 9.11.2016


2016, 1 Folie
European Mask and Lithography Conference <32, 2016, Dresden>
English
Poster, Electronic Publication
Fraunhofer IISB ()
direct laser writing; nanoimprint; hierarchical structures; PDMS

: http://publica.fraunhofer.de/documents/N-418901.html