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Comparative analysis of multi-mass high precision vibratory MEMS gyroscopes

 
: Popova, I.; Lestev, A.; Fedorov, M.; Rakityansky, O.; Ivanov, V.; Semenov, A.; Hiller, K.; Hahn, S.; Gessner, T.

Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin:
Smart Systems Integration 2015 : 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Copenhagen, Denmark, 11 - 12 March 2015
Aachen: Apprimus-Verlag, 2015
ISBN: 978-3-86359-296-7
pp.457-460
Smart Systems Integration Conference (SSI) <2015, Copenhagen>
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components <9, 2015, Copenhagen>
English
Conference Paper
Fraunhofer ENAS ()

Abstract
This paper reports comparative analysis of multi-mass high precision vibratory MEMS gyroscopes developed by JSC "GYROOPTICS" (Russia), integrated with a mixed-signal ASIC integrated results of single package. The MEMS gyroscopes have been designed by JSC "GYROOPTICS" Russia, St. Petersburg, and fabricated in cooperation with TUC, memsfab, FhG ENAS (Chemnitz). The advanced fabrication technology of the complicated encapsulated structure and the key gyroscope parameters within the temperature range from -60 °C to +60 °C are represented. Dependencies of main gyroscope parameters on technological tolerance, results of vibration tests and a long-time stability and comparison of two types of gyroscope designs are shown.

: http://publica.fraunhofer.de/documents/N-418321.html