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Nano particle production by laser ablation and metal sputtering on Si-wafer substrate

 
: Azhdast, M.H.; Azdasht, G.; Lüdeke, H.; Lang, K.-D.; Glaw, V.

:

Optical Society of America -OSA-, Washington/D.C.:
Advanced Solid State Lasers 2015 : Berlin, Germany, October 4-9, 2015
Washington, DC: OSA, 2015
ISBN: 978-1-943580-02-6
Paper AM5A.3
Conference "Advanced Solid State Lasers" (ASSL) <2015, Berlin>
English
Conference Paper
Fraunhofer IZM ()

Abstract
This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.

: http://publica.fraunhofer.de/documents/N-418010.html