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Quantification and reduction of deformations in multilayer soft-NIL stamps

Poster presented at MNE 2016, 42nd International Conference on Micro and Nano Engineering, 19-23 September 2016, Vienna, Austria
 
: Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar

:
Poster urn:nbn:de:0011-n-4175609 (1.4 MByte PDF)
MD5 Fingerprint: e60f27b6f18ff58e0beb2a3858d70237
Created on: 26.10.2016


2016, 1 Folie
International Conference on Micro & Nano Engineering (MNE) <42, 2016, Vienna>
Deutsche Forschungsgemeinschaft DFG
FR-713/10-1
Bragg-Gitter-Sensoren auf Basis von Hybridpolymeren - Grundlegende Untersuchungen und Realisierung
English
Poster, Electronic Publication
Fraunhofer IISB ()
nanoimprint; composite stamp; stamp deformation; soft-NIL

: http://publica.fraunhofer.de/documents/N-417560.html