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Characterization of low temperature plasma generated oxides on germanium based substrates

 
: Poduval, Geedhika Kallidil
: Czernohorsky, Malte; Lakner, Hubert; Fischer, Wolf-Joachim

Dresden, 2016, XVIII, 72 pp.
Dresden, TU, Master Thesis, 2016
English
Master Thesis
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-415106.html