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Multifunctional thin film sensor system as monitoring system in production

Multifunktionelles Dünnschicht-Sensorsystem als Überwachungssystem in der Produktion
: Biehl, Saskia; Rumposch, Christian; Paetsch, Nancy; Bräuer, Günter; Weise, Dieter; Scholz, Peter; Landgrebe, Dirk


Microsystem Technologies 22 (2016), No.7, pp.1757-1765
ISSN: 0946-7076
Europe Microtechnologies Symposium <7, 2015, Barcelona>
Journal Article, Conference Paper
Fraunhofer IWU ()
Fraunhofer IST ()
thin film sensor system; monitoring system; production

The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.