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  4. Multifunctional thin film sensor system as monitoring system in production
 
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2016
Journal Article
Title

Multifunctional thin film sensor system as monitoring system in production

Other Title
Multifunktionelles Dünnschicht-Sensorsystem als Überwachungssystem in der Produktion
Abstract
The two most important measurement categories in production are temperature and load. Therefore commercial sensors are applied in machinery as near as possible to the working parts. For a cost efficient production the integration of sensor elements directly on top of the surface in the heavily loaded regions is essential to get the real temperature and load distributions during the production process. Therefore a new multifunctional thin film sensor system is in development. This multilayer system combines thermoresistive sensor structures with piezoresistive ones and exists out of wear resistant carbon based layers. The sensor data will lead to a deeper process understanding, to optimization of simulation tools, to reduction of rejects and to an improvement of flexibility in production.
Author(s)
Biehl, Saskia
Rumposch, Christian
Paetsch, Nancy  
Bräuer, Günter  
Weise, Dieter  
Scholz, Peter  
Landgrebe, Dirk
Journal
Microsystem Technologies  
Conference
Europe Microtechnologies Symposium 2015  
DOI
10.1007/s00542-016-2831-5
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik IWU  
Keyword(s)
  • thin film sensor system

  • monitoring system

  • production

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