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Large area micro-/nano-structuring using direct laser interference patterning

 
: Lasagni, Andrés-Fabián; Kunze, Tim; Bieda, Matthias; Günther, Denise; Gärtner, Anne; Lang, Valentin; Rank, Andreas; Roch, Teja

:

Neuenschwander, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XXI, LAMOM 2016 : 15-18 February 2016, San Francisco, California, United States
Bellingham, WA: SPIE, 2016 (Proceedings of SPIE 9735)
ISBN: 978-1-62841-970-2
Paper 973515, 11 pp.
Conference "Laser Applications in Microelectronic and Optoelectronic Manufacturing" (LAMOM) <21, 2016, San Francisco/Calif.>
English
Conference Paper
Fraunhofer IWS ()
surface functionalization; direct laser interference patterning; high fabrication speed

Abstract
Smart surfaces are a source of innovation in the 21st Century. Potential applications can be found in a wide range of fields where improved optical, mechanical or biological properties can enhance the functions of products. In the last years, a method called Direct Laser Interference Patterning (DLIP) has demonstrated to be capable of fabricating a wide range of periodic surface patterns even with resolution at the nanometer and sub-micrometer scales. This article describes recent advances of the DLIP method to process 2D and 3D parts. Firstly, the possibility to fabricate periodic arrays on metallic substrates with sub-micrometer resolution is shown. After that, different concepts to process three dimensional parts are shown, including the use of Cartesian translational stages as well as an industrial robot arm. Finally, some application examples are described.

: http://publica.fraunhofer.de/documents/N-408911.html