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Pinhole-free ultra-thin nanocrystalline diamond film growth via electrostatic self-assembly seeding with increased salt concentration of nanodiamond colloids

 
: Yoshikawa, T.; Gao, F.; Zürbig, V.; Giese, C.; Nebel, C.E.; Ambacher, O.; Lebedev, V.

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Diamond and Related Materials 63 (2016), pp.103-107
ISSN: 0925-9635
International Conference on New Diamond and Nano Carbons (NDNC) <9, 2015, Shizuoka>
English
Journal Article, Conference Paper
Fraunhofer IAF ()
nanodiamond seeding; nanocrystalline diamond films; ultra-thin films; Pinholes

Abstract
We demonstrate the successful chemical vapor deposition of pinhole-free extremely thin (10-50 nm) nanocrystalline diamond (NCD) films to examine the potential of electrostatic self-assembly seeding with increased salt concentration of nanodiamond colloids as a nucleation enhancement step. The deposited films are characterized by scanning electron microscopy (SEM) and Raman spectroscopy to evaluate their surface morphologies and crystalline qualities. To carefully detect pinholes which are invisible via SEM, linear sweep voltammetry and cyclic voltammetry are also performed on the NCD film surfaces using the electrochemical oxidation of underlying silicon substrates. These investigations reveal that ~. 30. nm thick continuous NCD films are successfully obtained and completely pinhole-free ~. 50. nm thick films are reliably accessible via the proposed seeding technique.

: http://publica.fraunhofer.de/documents/N-408777.html