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Prospects and issues of nanomaterials use in microelectronics

Poster presented at Materials Research Society Spring Meeting 2016, Phoenix, Arizona, USA
: Jank, Michael; Bauer, Anton; Frey, Lothar

Poster urn:nbn:de:0011-n-4047688 (1.5 MByte PDF)
MD5 Fingerprint: c0f6c54a5099242bd71bfb33e5f5efe9
Created on: 26.7.2016

2016, 1 Folie
Materials Research Society (Spring Meeting) <2016, Phoenix/Ariz.>
European Commission EC
H2020; 688194; NanoStreeM
NANOmaterials: STRategies for Safety Assessments in Advanced Integrated Circuits Manufacturing
Poster, Electronic Publication
Fraunhofer IISB ()
nanomaterials; integrated circuit; processing; devices; nanodevices; assembly