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Theory of co-adsorption and its application to copper superfilling

Presentation held at 227th ECS Meeting 2015, Chicago, IL, USA, 24 - 28 May 2015
 
: Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel

:
presentation urn:nbn:de:0011-n-3996232 (1.4 MByte PDF)
MD5 Fingerprint: cf17846bac4891bdd03fd5a57d7d764f
Created on: 30.6.2016


2015, 11 Folien
Electrochemical Society (ECS Meeting) <227, 2015, Chicago/Ill.>
English
Presentation, Electronic Publication
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-399623.html