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Thermal conductivity of ultra low-k dielectrics

 
: Delan, A.; Rennau, M.; Schulz, S.E.; Gessner, T.

Thomas, O.:
Materials for advanced metallization : Proceedings of the European Workshop on Materials for Advanced Metallization 2003 : La Londe Les Maures, France, March 9 - 12, 2003
Amsterdam: Elsevier, 2003 (Microelectronic engineering 70.2003, 2/4)
pp.280-284
European Workshop on Materials for Advanced Metallization (MAM) <2003, La Londe Les Maures, France>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/N-39381.html