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2016
Journal Article
Titel
Integration of high-frequency M-type hexagonal ferrite inductors in LTCC multilayer modules
Abstract
Monolithic hexagonal BaCo1,3Ti1,3Fe9,4O19 ferrite multilayers sintered at 900 °C exhibit a fine-grained microstructure with permeability of m' = 16 and a resonance frequency fr > 1 GHz. Co-firing of hetero-laminates of ferrite with CT700 glass-ceramic LTCC tapes and with polycrystalline zinc titanate (ZT) LTCC tapes was studied. Co-firing at 900 °C of ferrite/CT700 leads to multilayers with cracks caused by substantial thermal expansion mismatch. Co-fired ferrite/ZT multilayer laminates exhibit a permeability of m' = 16 and do not show any defects. Hexagonal ferrite multilayer inductor elements were integrated into ZT-based multilayer LTCC modules and co-fired at 900 °C with Ag metallization.
Author(s)