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Integration of high-frequency M-type hexagonal ferrite inductors in LTCC multilayer modules

 
: Bierlich, Silvia; Reimann, Timmy; Barth, Stefan; Capraro, Beate; Bartsch, Heike; Müller, Jens; Töpfer, Jörg

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International journal of applied ceramic technology 13 (2016), No.3, pp.540-548
ISSN: 1546-542X
ISSN: 1744-7402
English
Journal Article
Fraunhofer IKTS ()
Zink; Titanate; Laminatschichten; Mehrfachschicht

Abstract
Monolithic hexagonal BaCo1,3Ti1,3Fe9,4O19 ferrite multilayers sintered at 900 °C exhibit a fine-grained microstructure with permeability of μ′ = 16 and a resonance frequency fr ≥ 1 GHz. Co-firing of hetero-laminates of ferrite with CT700 glass–ceramic LTCC tapes and with polycrystalline zinc titanate (ZT) LTCC tapes was studied. Co-firing at 900 °C of ferrite/CT700 leads to multilayers with cracks caused by substantial thermal expansion mismatch. Co-fired ferrite/ZT multilayer laminates exhibit a permeability of μ′ = 16 and do not show any defects. Hexagonal ferrite multilayer inductor elements were integrated into ZT-based multilayer LTCC modules and co-fired at 900 °C with Ag metallization.

: http://publica.fraunhofer.de/documents/N-391798.html