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2000
Journal Article
Titel
Small-size silicon-oxynitride AWG demultiplexer operating around 725 nm
Abstract
We present experimental results of very compact, high Delta-n, five-channel arrayed waveguide gratings (AWG's) with 5 nm-channel-spacing fabricated in the silicon-oxynitride material system. The on-chip insertion loss is about 5 dB and the crosstalk is -30 dB around 725 nm wavelength. the uniformity of the waveguide layers is better than + -1%.