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Tunable multisegment Si(x)N(y)/AlN piezo lenses for wavefront correction

: Zürbig, V.; Pätz, D.; Fries, J.; Bichra, M.; Pletschen, W.; Holc, K.; Reusch, M.; Nebel, C.E.; Sinzinger, S.; Ambacher, O.; Lebedev, V.


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 : 21-25 June 2015, Anchorage, Alaska, USA
Piscataway, NJ: IEEE, 2015
ISBN: 978-1-4799-8955-3
ISBN: 978-1-4799-8954-6
International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) <18, 2015, Anchorage/Alaska>
Conference Paper
Fraunhofer IAF ()
microlenses; shack-hartmann wavefront sensor; aluminium nitride; silicon nitride; piezo-actuation

A combined layer structure of aluminum nitride (AlN) and silicon nitride (SixNy) enables the fabrication of multisegment piezo-actuated micro lenses with a precise control of the lens surface. It is demonstrated that these micro lenses offer free aspheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AlN/SixNy micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.